CVD・ALD材料
CVD・ALD材料とは
CVD・ALD材料とは蒸気圧を有する原材料をガス化させ、様々な条件下における気相中の化学変化を利用し、希望する物質を成膜するための材料です。
高純度化学研究所は希土類を含む幅広い元素のCVD・ALD材料の提供が可能です。
CVD・ALD材料はシリンダーでの供給が一般的です。
使用量や装置仕様に合わせた設計・製作も可能です。
ガラス製アンプルは、アルコキシド、ハロゲン化物の少量供給容器として最もよく利用されています。
層間絶縁膜形成用材料
シリコン半導体用液体CVD材料のうち、現在使用されている金属有機化合物はTEOS、TMB、TEB、TMP、TMOP、TEOPが一般的です。
高純度化学研究所は半導体デバイス用に現在最も大量に用いられているCVD材料であるTEOSのパイオニアであり、TEOSとともに用いられることが多いTEOP、TEBなどをはじめ、様々な種類のCVD材料を製造しています。
| 略称 | 化学式 |
|---|---|
| TMB | B(OCH3)3 |
| TMP | P(OCH3)3 |
| TEB | B(OC2H5)3 |
| TEOS | Si(OC2H5)4 |
| TMOP® | PO(OCH3)3 |
| TEOP® | PO(OC2H5)3 |
高・強誘電体 電極形成用 CVD材料
不揮発性メモリなどに使用される強誘電体用のMOCVD材料をご紹介します。
Pb(Zr,Ti)O3(PZT)用にはdpmのようなβ-ジケトナート配位子を持つ錯体や、高誘電体膜のTa2O5用にはTa(OC2H5)5が一般的に用いられます。
ALD用材料
ALD法とは窒化膜や酸化膜を原子層で基板上に形成し、10nm程度の薄膜を制御よく作るのに用いられます。
材料としては、酸化剤と反応性が高く、金属アルコキシドのように、自己熱分解で酸化膜ができないものが適しています。
ゲート絶縁膜やバリヤ膜には窒化膜が有効であることから金属アミド、イミド、金属塩化物が用いられます。
金属アミドはM-NR1R2、金属イミドはM=NR、金属塩化物はMClxで表される化合物です。
TEMAZ、TDMAH、TBTEMT、ZrCl4、HfCl4、WCl6、AlCl3が一般的に使用されます。
希土類元素のシクロペンタジエニル化合物RE(EtCp)₃
希土類元素は膜に特殊な機能をもたせることができ、
半導体だけではなく、光学・エネルギー・磁性・触媒など幅広い用途で利用されます。
EtCpはCpに比べ低融点化が可能なプリカーサとして注目されています。
合成実績のあるRE(EtCp)₃（研究、試作、量産含む）
| Y(EtCp)₃ | Sm(EtCp)₃ |
| La(EtCp)₃ | Gd(EtCp)₃ |
| Ce(EtCp)₃ | Tb(EtCp)₃ |
| Pr(EtCp)₃ | Er(EtCp)₃ |
| Nd(EtCp)₃ | Yb(EtCp)₃ |
β-ジケトン錯体
β‐ジケトン錯体はCVD材料の中では安定性が高く、取り扱いしやすいことが特徴です。ミストCVDや超臨界流体を利用したCVD等で利用されています。
高純度化学研究所では30種類を超えるβ-ジケトン錯体を取り扱っており、dpm以外のβ-ジケトン系低融点ALD/CVD材料の開発を行っております。
アンプル瓶、及びシリンダー(支給品充填・新規製造可)での供給が可能です。
族別カタログ
高純度化学研究所は希土類を含む幅広い元素のALD/CVD材料の提供が可能です。族別に提案可能な製品については次ページ以降にございます表をご覧ください。
Group 1
| Elements | Products | Name | |
|---|---|---|---|
| Li | Li(O-t-C₄H₉) | LiOtBu | Lithium t-Butoxide |
| Li(C₁₁H₁₉O₂) | Li(dpm) | Lithium Dipivaloylmethanate | |
| Na | Na(O-t-C₄H₉) | NaOtBu | Sodium t-Butoxide |
| Na(C₁₁H₁₉O₂) | Na(dpm) | Sodium Dipivaloylmethanate | |
| K | K(O-t-C₄H₉) | KOtBu | Potassium t-Butoxide |
| K(C₁₁H₁₉O₂) | K(dpm) | Potassium Dipivaloylmethanate | |
| Rb | Rb(O-t-C₄H₉) | RbOtBu | Rubidium t-Butoxide |
| Cs | Cs(O-t-C₄H₉) | CsOtBu | Cesium t-Butoxide |
Group 2
| Elements | Products | Name | |
|---|---|---|---|
| Mg | Mg(C₁₁H₁₉O₂)₂ | Mg(dpm)₂ | Magnesium Bis-Dipivaloylmethanate |
| Ca | Ca(C₁₁H₁₉O₂)₂ | Ca(dpm)₂ | Calcium Bis-Dipivaloylmethanate |
| Sr | Sr(C₁₁H₁₉O₂)₂ | Sr(dpm)₂ | Strontium Bis-Dipivaloylmethanate |
| Sr[C₅(CH₃)₅]₂ | Sr(Cp*)₂ | Bis (Pentamethylcyclopentadienyl) Strontium | |
| Sr[C₅(CH₃)₄(C₃H₇)]₂ | Sr(Cpᵖᵐ)₂ | Bis (Propyltetramethylcyclopentadienyl) Strontium | |
| Ba | Ba(C₁₁H₁₉O₂)₂ | Ba(dpm)₂ | Barium Bis-Dipivaloylmethanate |
| Ba[C₅(CH₃)₄(C₃H₇)]₂ | Ba(Cpᵖᵐ)₂ | Bis (Propyltetramethylcyclopentadienyl) Barium |
Group 3
| Elements | Products | Name | |
|---|---|---|---|
| Sc | Sc(i-C₃H₇C₅H₄)₃ | Sc(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Scandium |
| Sc(C₁₀H₁₅O₂)₃ | Sc(ibac)₃ | Scandium Tris-Isobutyrylacetonate | |
| Sc(C₉H₁₃O₂)₃ | Sc(ibprm)₃ | Scandium Tris-Isobutyrylpropionylmethanate | |
| Sc(C₉H₁₅O₂)₃ | Sc(dibm)₃ | Scandium Tris-Diisobutyrylmetanate | |
| Sc(C₁₁H₁₉O₂)₃ | Sc(dpm)₃ | Scandium Tris-Dipivaloylmethanate | |
| Y | Y(n-C₄H₉C₅H₄)₃ | Y(nBuCp)₃ | Tris (n-Butylcyclopentadienyl) Yttrium |
| Y(C₁₁H₁₉O₂)₃ | Y(dpm)₃ | Yttrium Tris-Dipivaloylmethanate | |
| Y[N(Si(CH₃)₃)₂]₃ | Y(tmsa)₃ | Yttrium Tris[Bis (Trimethylsilyl) Amino] | |
| La | La(i-C₃H₇C₅H₄)₃ | La(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Lanthanum |
| La(C₅H₄C₂H₅)₃ | La(EtCp)₃ | Tris (Ethylcyclopentadienyl) Lanthanum | |
| La(C₁₁H₁₉O₂)₃ | La(dpm)₃ | Lanthanum Tris-Dipivaloylmethanate | |
| La(C₉H₁₅O₂)₃ | La(dibm)₃ | Lanthanum Tris-Diisobutyrylmetanate | |
| La[N(Si(CH₃)₃)₂]₃ | La[N(SiMe₃)₂]₃ | Lanthanum Tris[Bis (Trimethylsilyl) Amino] | |
| Ce | Ce(C₅H₄C₂H₅)₃ | Ce(EtCp)₃ | Tris (Etylcyclopentadienyl) Cerium |
| Ce[(C₃H₇)C₅H₄]₃ | Ce(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Cerium | |
| Ce(C₁₁H₁₉O₂)₄ | Ce(dpm)₄ | Cerium Tetrakis-Dipivaloylmethnate | |
| Pr | Pr(C₃H₇C₅H₄)₃ | Pr(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Praseodymium |
| Pr(C₁₁H₁₉O₂)₃ | Pr(dpm)₃ | Praseodymium Tris-Dipivaloylmethanate | |
| Pr(C₅H₄C₂H₅)₃ | Pr(EtCp)₃ | Tris (Ethylcyclopentadienyl) Praseodymium | |
| Nd | Nd(C₅H₄C₂H₅)₃ | Nd(EtCp)₃ | Tris (Ethylcyclopentadienyl) Neodymium |
| Nd(C₅H₄CH(CH₃)₂)₃ | Nd(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Neodymium | |
| Nd(C₁₁H₁₉O₂)₃ | Nd(dpm)₃ | Neodymium Tris-Dipivaloylmethanate | |
| Nd(C₉H₁₅O₂)₃ | Nd(dibm)₃ | Neodymium Tris-Diisobutyrylmetanate | |
| Sm | Sm(C₅H₄C₂H₅)₃ | Sm(EtCp)₃ | Tris (Etylcyclopentadienyl) Samarium |
| Sm(C₁₁H₁₉O₂)₃ | Sm(dpm)₃ | Samarium Tris-Dipivaloylmethanate | |
| Eu | Eu[C₅(CH₃)₄(C₃H₇)]₂ | Eu(Cpᵖᵐ)₂ | Bis (n-Propyltetramethylcyclopentadienyl) Europium |
| Eu(C₁₁H₁₉O₂)₃ | Eu(dpm)₃ | Europium Tris-Dipivaloylmethanate | |
| Gd | Gd(C₅H₄C₂H₅)₃ | Gd(EtCp)₃ | Tris (Ethylcyclopentadienyl) Gadolinium |
| Gd(C₅H₄CH(CH₃)₂)₃ | Gd(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Gadolinium | |
| Gd(N(Si(CH₃)₃)₂)₃ | Gd[N(SiMe₃)₂]₃ | Gadolinium Tris[Bis (Trimethylsilyl) Amide] | |
| Gd(C₁₁H₁₉O₂)₃ | Gd(dpm)₃ | Gadolinium Tris-Dipivaloylmethanate | |
| Tb | Tb(i-C₃H₇C₅H₄)₃ | Tb(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Terbium |
| Tb(C₉H₁₅O₂)₃ | Tb(dibm)₃ | Terbium Tris (Diisobutyrylmethanate) | |
| Tb(C₁₁H₁₉O₂)₃ | Tb(dpm)₃ | Terbium Tris-Dipivaloylmethanate | |
| Dy | Dy(C₅H₄C₂H₅)₃ | Dy(EtCp)₃ | Tris (Ethylcyclopentadienyl) Dysprosium |
| Dy(C₁₁H₁₉O₂)₃ | Dy(dpm)₃ | Dysprosium Tris-Dipivaloylmethanate | |
| Ho | Ho(C₁₁H₁₉O₂)₃ | Ho(dpm)₃ | Holmium Tris-Dipivaloylmethanate |
| Er | Er(C₅H₄CH₃)₃ | Er(MeCp)₃ | Tris (Methylcyclopentadienyl) Erbium |
| Er(C₅H₄C₂H₅)₃ | Er(EtCp)₃ | Tris (Ethylcyclopentadienyl) Erbium | |
| Er(C₃H₇C₅H₄)₃ | Er(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Erbium | |
| Er(C₁₁H₁₉O₂)₃ | Er(dpm)₃ | Erbium Tris-Dipivaloylmethanate | |
| Tm | Tm(i-C₃H₇C₅H₄)₃ | Tm(iPrCp)₃ | Tris (i-propylcyclopentadienyl) Thulium |
| Tm(C₁₁H₁₉O₂)₃ | Tm(dpm)₃ | Thulium Tris-Dipivaloylmethanate | |
| Yb | Yb(i-C₃H₇C₅H₄)₃ | Yb(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Ytterbium |
| Yb(C₁₁H₁₉O₂)₃ | Yb(dpm)₃ | Ytterbium Tris-Dipivaloylmethanate | |
| Lu | Lu(C₁₁H₁₉O₂)₃ | Lu(dpm)₃ | Lutetium Tris-Dipivaloylmethanate |
Group 4
| Elements | Products | Name | |
|---|---|---|---|
| Ti | Ti(OC₂H₅)₄ | Ti(OEt)₄ | Titanium Tetraethoxide |
| Ti(O-i-C₃H₇)₄ | Ti(OiPr)₄ | Titanium Tetra-i-Propoxide | |
| Ti(O-t-C₄H₉)₄ | Ti(OtBu)₄ | Titanium Tetra-t-Butoxide | |
| Ti[N(CH₃)₂]₄ | Ti(NMe₂)₄ | Titanium Tetrakisdimethylamide | |
| Ti[N(C₂H₅)₂]₄ | Ti(NEt₂)₄ | Titanium Tetrakisdiethylamide | |
| Ti[N(C₂H₅)CH₃]₄ | Ti(NEtMe)₄ | Tetrakis (Ethylmethylamino) Titanium | |
| Ti(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Ti(OiPr)₂(dpm)₂ | Titanium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Ti(O-i-C₃H₇)₂(C₉H₁₅O₂)₂ | Ti(OiPr)₂(dibm)₂ | Titanium Di (i-Propoxy) Bis (Diisobutyrylmethanate) | |
| Zr | Zr(O-i-C₃H₇)₄ | Zr(OiPr)₄ | Zirconium Tetra-i-Propoxide |
| Zr(O-t-C₄H₉)₄ | Zr(OtBu)₄ | Zirconium Tetra-t-Butoxide | |
| Zr(O-t-C₄H₉)(C₁₁H₁₉O₂)₃ | Zr(OtBu)(dpm)₃ | Zirconium (t-Butoxy) Tris (Dipivaloylmethanate) | |
| Zr(C₁₁H₁₉O₂)₄ | Zr(dpm)₄ | Zirconium Tetrakis-Dipivaloylmethanate | |
| Zr(O-i-C₃H₇)(C₁₁H₁₉O₂)₃ | Zr(OiPr)(dpm)₃ | Zirconium (i-Propoxy) Tris (Dipivaloylmethanate) | |
| Zr(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Zr(OiPr)₂(dpm)₂ | Zirconium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Zr[N(CH₃)₂]₄ | Zr(NMe₂)₄ | Tetrakis (Dimethylamino) Zirconium | |
| Zr[N(C₂H₅)CH₃]₄ | Zr(NEtMe)₄ | Tetrakis (Ethylmethylamino) Zirconium | |
| Zr(C₉H₁₅O₂)₄ | Zr(dibm)₄ | Zirconium Tetrakis-Diisobutyrylmethanate | |
| Hf | Hf(O-t-C₄H₉)₄ | Hf(OtBu)₄ | Hafnium Tetra-t-Butoxide |
| Hf(C₁₁H₁₉O₂)₄ | Hf(dpm)₄ | Hafnium Tetrakis (Dipivaloylmethanate) | |
| Hf(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Hf(OiPr)₂(dpm)₂ | Hafnium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Hf[N(CH₃)₂]₄ | Hf(NMe₂)₄ | Tetrakis (Dimethylamino) Hafnium | |
| Hf[N(C₂H₅)CH₃]₄ | Hf(NEtMe)₄ | Tetrakis (Ethylmethylamino) Hafnium | |
| Hf[N(C₂H₅)₂]₄ | Hf(NEt₂)₄ | Tetrakis (Diethylamino) Hafnium |
Group 5
| Elements | Products | Name | |
|---|---|---|---|
| V | VO(OCH₃)₃ | VO(OMe)₃ | Vanadium (V) Trimethoxideoxide |
| VO(OC₂H₅)₃ | VO(OEt)₃ | Vanadium (V) Triethoxideoxide | |
| VO(O-i-C₃H₇)₃ | VO(OiPr)₃ | Vanadium (V) Tri-i-Propoxideoxide | |
| VO(O-n-C₃H₇)₃ | VO(OnPr)₃ | Vanadium (V) Tri-n-Propoxideoxide | |
| VO(O-i-C₄H₉)₃ | VO(OiBu)₃ | Vanadium (V) Tri-i-Butoxideoxide | |
| VO(O-n-C₄H₉)₃ | VO(OnBu)₃ | Vanadium (V) Tri-n-Butoxideoxide | |
| VO(O-sec-C₄H₉)₃ | VO(OsecBu)₃ | Vanadium (V) Tri-sec-Butoxideoxide | |
| VO(O-t-C₄H₉)₃ | VO(OtBu)₃ | Vanadium (V) Tri-t-Butoxideoxide | |
| V(C₁₁H₁₉O₂)₃ | V(dpm)₃ | Vanadium Tris-Dipivaloylmethanate | |
| V(N(CH₃)₂)₅ | V(NMe₂)₅ | Pentakis (Dimethylamino) Vanadium | |
| V(N(C₂H₅)CH₃)₄ | V(NEtMe)₄ | Pentakis (Ethylmethylamino) Vanadium | |
| Nb | Nb(OCH₃)₅ | Nb(OMe)₅ | Niobium Pentamethoxide |
| Nb(OC₂H₅)₅ | Nb(OEt)₅ | Niobium Pentaethoxide | |
| Nb(O-i-C₄H₉)₅ | Nb(OiBu)₅ | Niobium Penta-i-Butoxide | |
| Nb(O-sec-C₄H₉)₅ | Nb(OsecBu)₅ | Niobium Penta-sec-Butoxide | |
| Nb[NC(CH₃)₃][N(C₂H₅)(CH₃)]₃ | Nb(NtBu)(NEtMe)₃ | (t-Butylimido) Tris (Ethylmethylamido) Niobium | |
| Nb(N-t-C₅H₁₁)[N(CH₃)₂]₃ | Nb(NtAm)(NMe₂)₃ | t-Amylimido Tris (Dimethylamido) Niobium | |
| Ta | Ta(OCH₃)₅ | Ta(OMe)₅ | Tantalum Pentamethoxide |
| Ta(OC₂H₅)₅ | Ta(OEt)₅ | Tantalum Pentaethoxide | |
| Ta(O-i-C₃H₇)₅ | Ta(OiPr)₅ | Tantalum Penta-i-Propoxide | |
| Ta(O-n-C₃H₇)₅ | Ta(OnPr)₅ | Tantalum Penta-n-Propoxide | |
| Ta(O-n-C₄H₉)₅ | Ta(OnBu)₅ | Tantalum Penta-n-Butoxide | |
| Ta(O-sec-C₄H₉)₅ | Ta(OsecBu)₅ | Tantalum Penta-sec-Butoxide | |
| Ta(N-t-C₅H₁₁)[N(CH₃)₂]₃ | Ta(NtAm)(NMe₂)₃ | t-Amylimido Tris (Dimethylamino) Tantalum | |
| Ta(N-t-C₄H₉)[N(CH₃)₂]₃ | Ta(NtBu)(NMe₂)₃ | t-Butylimido Tris (Dimethylamino) Tantalum | |
| Ta(N-t-C₄H₉)[N(C₂H₅)CH₃]₃ | Ta(NtBu)(NEtMe)₃ | (t-Butylimido) Tris (Ethylmethylamino) Tantalum |
Group 6
| Elements | Products | Name | |
|---|---|---|---|
| Cr | Cr(C₁₁H₁₉O₂)₃ | Cr(dpm)₃ | Chromium Tris-Dipivaloylmethanate |
| Mo | Mo(C₁₁H₁₉O₂)₃ | Mo(dpm)₃ | Molybdenum Tris-Dipivaloylmethanate |
| W | W(OC₂H₅)₅ | W(OEt)₅ | Tungsten Pentaethoxide |
Group 7
| Elements | Products | Name | |
|---|---|---|---|
| Mn | Mn(C₁₁H₁₉O₂)₃ | Mn(dpm)₃ | Manganese Tris-Dipivaloylmethanate |
Group 8
| Elements | Products | Name | |
|---|---|---|---|
| Fe | Fe(C₁₁H₁₉O₂)₃ | Fe(dpm)₃ | Iron Tris-Dipivaloylmethanate |
| Fe(C₉H₁₅O₂)₃ | Fe(dibm)₃ | Iron Tris-Diisobutyrylmethanate | |
| Ru | Ru(C₅H₄C₂H₅)₂ | Ru(EtCp)₂ | Bis (Ethylcyclopentadienyl) Ruthenium |
| Ru(C₁₁H₁₉O₂)₃ | Ru(dpm)₃ | Ruthenium Tris-Dipivaloylmethanate | |
| Ru(C₉H₁₅O₂)₃ | Ru(dibm)₃ | Ruthenium Tris-Diisobutyrylmethanate |
Group 9
| Elements | Products | Name | |
|---|---|---|---|
| Co | Co(C₅H₄C₂H₅)₂ | Co(EtCp)₂ | Bis (Ethylcyclopentadienyl) Cobalt |
| Co(C₁₁H₁₉O₂)₂ | Co(dpm)₂ | Cobalt Bis-Dipivaloylmethanate | |
| Co(C₁₁H₁₉O₂)₃ | Co(dpm)₃ | Cobalt Tris-Dipivaloylmethanate | |
| Ir | Ir(C₅H₄C₂H₅)(C₈H₁₂) | Ir(EtCp)(cod) | Ethycyclopentadienyl/ (1, 5-Cyclooctadiene) Iridium |
Group 10
| Elements | Products | Name | |
|---|---|---|---|
| Ni | Ni(C₅H₄C₂H₅)₂ | Ni(EtCp)₂ | Bis (Ethylcyclopentadienyl) Nickel |
| Ni(C₁₁H₁₉O₂)₂ | Ni(dpm)₂ | Nickel Bis-Dipivaloylmethanate | |
| Ni(C₉H₁₅O₂)₂ | Ni(dibm)₂ | Nickel Bis-Diisobutyrylmethanate | |
| Pd | Pd(C₁₁H₁₉O₂)₂ | Pd(dpm)₂ | Palladium Bis-Dipivaloylmethanate |
Group 11
| Elements | Products | Name | |
|---|---|---|---|
| Cu | Cu(C₁₁H₁₉O₂)₂ | Cu(dpm)₂ | Copper Bis-Dipivaloylmethanate |
| Cu(C₉H₁₅O₂)₂ | Cu(dibm)₂ | Copper Bis-Diisobutyrylmethanate | |
| Cu(C₅HF₆O₂)₂ | Cu(hfac)₂ | Copper Hexafluoroacetylacetonate | |
| Au | AuP(CH₃)₃(CH₃)₃ | Au(PMe₃)Me₃ | Trimethyl (Trimethylphosphine) Gold |
Group 12
| Elements | Products | Name | |
|---|---|---|---|
| Zn | Zn(C₁₁H₁₉O₂)₂ | Zn(dpm)₂ | Zinc Bis-Dipivaloylmethanate |
| Zn[C₅(CH₃)₄(C₃H₇)]₂ | Zn(Cpᵖᵐ)₂ | Bis (Tetramethyl n-Propyl Cyclopentadienyl) Zinc |
Group 13
| Elements | Products | Name | |
|---|---|---|---|
| B | B(OCH₃)₃ | B(OMe)₃ | Boron Trimethoxide |
| B(OC₂H₅)₃ | B(OEt)₃ | Boron Triethoxide | |
| B[N(C₂H₅)CH₃]₃ | B(NEtMe)₃ | Tris (Ethylmethylamino) Borane | |
| Al | Al(O-i-C₃H₇)₃ | Al(OiPr)₃ | Aluminum Tri-i-Propoxide |
| Al(O-n-C₄H₉)₃ | Al(OnBu)₃ | Aluminum Tri-n-Butoxide | |
| Al(O-i-C₄H₉)₃ | Al(OiBu)₃ | Aluminum Tri-i-Butoxide | |
| Al(O-sec-C₄H₉)₃ | Al(OsecBu)₃ | Aluminum Tri-sec-Butoxide | |
| Al(C₁₁H₁₉O₂)₃ | Al(dpm)₃ | Aluminum Tris-Dipivaloylmethanate | |
| Al(C₅H₇O₂)₃ | Al(acac)₃ | Aluminum Tris-Acetylacetonate | |
| Al(C₉H₁₅O₂)₃ | Al(dibm)₃ | Aluminum Tris-Diisobutyrylmethanate | |
| Ga | Ga(OCH₃)₃ | Ga(OMe)₃ | Gallium Trimethoxide |
| Ga(OC₂H₅)₃ | Ga(OEt)₃ | Gallium Triethoxide | |
| Ga(O-i-C₃H₇)₃ | Ga(OiPr)₃ | Gallium Tri-i-Propoxide | |
| Ga(O-n-C₄H₉)₃ | Ga(OnBu)₃ | Gallium Tri-n-Butoxide | |
| Ga[C₅(CH₃)₅] | Ga(Cp*) | Pentamethylcyclopentadienyl Gallium | |
| Ga(C₅H₇O₂)₃ | Ga(acac)₃ | Gallium Tris-Acetylacetonate | |
| Ga(C₁₁H₁₉O₂)₃ | Ga(dpm)₃ | Gallium Tris-Dipivaloylmethanate | |
| In | In(C₅H₄C₂H₅) | In(EtCp) | Ethylcyclopentadienyl Indium |
Group 14
| Elements | Products | Name | |
|---|---|---|---|
| Si | Si(O-i-C₃H₇)₄ | Si(OiPr)₄ | Silicon Tetra-i-Propoxide |
| Si(O-n-C₄H₉)₄ | Si(OnBu)₄ | Silicon Tetra-n-Butoxide | |
| Si(O-i-C₄H₉)₄ | Si(OiBu)₄ | Silicon Tetra-i-Butoxide | |
| Si(O-t-C₄H₉)₄ | Si(OtBu)₄ | Silicon Tetra-t-Butoxide | |
| SiH[N(CH₃)₂]₃ | SiH(NMe₂)₃ | Tris Dimethylamino Silane | |
| Ge | Ge(OCH₃)₄ | Ge(OMe)₄ | Germanium Tetramethoxide |
| Ge(OC₂H₅)₄ | Ge(OEt)₄ | Germanium Tetraethoxide | |
| Ge(O-i-C₃H₇)₄ | Ge(OiPr)₄ | Germanium Tetra-i-Propoxide | |
| Ge(O-n-C₃H₇)₄ | Ge(OnPr)₄ | Germanium Tetra-n-Propoxide | |
| Ge(O-n-C₄H₉)₄ | Ge(OnBu)₄ | Germanium Tetra-n-Butoxide | |
| Ge(O-sec-C₄H₉)₄ | Ge(OsecBu)₄ | Germanium Tetra-sec-Butoxide | |
| Ge(N(CH₃)₂)₄ | Ge(NMe₂)₄ | Tetrakis (Dimethylamino) Germane | |
| Sn | Sn(C₅H₄C₂H₅)₂ | Sn(EtCp)₂ | Bis (Ethylcyclopentadienyl) Tin |
| Sn[N(C₂H₅)₂]₄ | Sn(NEt₂)₄ | Tetrakis (Diethylamino) Tin | |
| Sn[N(CH₃)₂]₄ | Sn(NMe₂)₄ | Tetrakis (Dimethylamino) Tin | |
| Pb | Pb(C₁₁H₁₉O₂)₂ | Pb(dpm)₂ | Lead Bis-Dipivaloylmethanate |
| Pb(C₉H₁₅O₂)₂ | Pb(dibm)₂ | Lead Bis-Diisobutyrylmethanate |
Group 15
| Elements | Products | Name | |
|---|---|---|---|
| P | P(OCH₃)₃ | P(OMe)₃ | Trimethylphosphite |
| P(OC₂H₅)₃ | P(OEt)₃ | Triethylphosphite | |
| PO(OCH₃)₃ | PO(OMe)₃ | Trimethylphosphate | |
| PO(OC₂H₅)₃ | PO(OEt)₃ | Triethylphosphate | |
| PO(O-n-C₄H₉)₃ | PO(OnBu)₃ | Tri-n-Butyl Phosphate | |
| Sb | Sb(OCH₃)₃ | Sb(OMe)₃ | Antimony Trimethoxide |
| Sb(OC₂H₅)₃ | Sb(OEt)₃ | Antimony Triethoxide | |
| Sb(O-i-C₃H₇)₃ | Sb(OiPr)₃ | Antimony Tri-i-Propoxide | |
| Sb(O-n-C₃H₇)₃ | Sb(OnPr)₃ | Antimony Tri-n-Propoxide | |
| Sb(O-i-C₄H₉)₃ | Sb(OiBu)₃ | Antimony Tri-i-Butoxide | |
| Sb(O-n-C₄H₉)₃ | Sb(OnBu)₃ | Antimony Tri-n-Butoxide | |
| Sb(O-sec-C₄H₉)₃ | Sb(OsecBu)₃ | Antimony Tri-sec-Butoxide | |
| Sb(O-t-C₄H₉)₃ | Sb(OtBu)₃ | Antimony Tri-t-Butoxide | |
| Sb[N(CH₃)₂]₃ | Sb(NMe₂)₃ | Tris (Dimethylamino) Antimony | |
| Bi | Bi[N(Si(CH₃)₃)₂]₃ | Bi[N(SiMe₃)₂]₃ | Tris[Bis (Trimethylsilyl) amino]bismuthine |
| Bi(O-t-C₅H₁₁)₃ | Bi(OtAm)₃ | Bismuth Tri-t-Amyloxide | |
| Bi(C₆H₅)₃ | Bi(Ph)₃ | Bismuthine Triphenyl | |
| Bi(C₁₁H₁₉O₂)₃ | Bi(dpm)₃ | Bismuth Tris-Dipivaloylmethanate |
Group 16
| Elements | Products | Name | |
|---|---|---|---|
| Te | Te(OC₂H₅)₄ | Te(OEt)₄ | Tellurium Tetraethoxide |
| Te(Si(CH₃)₃)₂ | Te(SiMe₃)₂ | Bis (Trimethylsilyl) Tellurium |