CVD/ALD Materials
What are CVD and ALD Materials?
CVD materials are raw materials with vapor pressure that are gasified to deposit desired thin films through chemical reactions in the gas phase under various conditions.
Kojundo Chemical Laboratory offers a wide range of ALD/CVD materials covering various elements, including rare earth elements.
CVD materials are typically supplied in cylinders.
We can also design and manufacture containers tailored to your usage volume and equipment specifications.
Glass ampoules are most commonly used as supply containers for small quantities of alkoxides and halides.
Materials for Forming Interlayer Insulating Film
Among liquid CVD materials for silicon semiconductors, commonly used metal-organic compounds today include TEOS, TMB, TEB, TMP, TMOP, and TEOP.
As a pioneer in TEOS—the most widely used CVD material for semiconductor devices today—we manufacture a diverse range of CVD materials, including TEOP and TEB, which are frequently used alongside TEOS.
| Abbreviation | Chemical Formula |
|---|---|
| TMB | B(OCH3)3 |
| TMP | P(OCH3)3 |
| TEB | B(OC2H5)3 |
| TEOS | Si(OC2H5)4 |
| TMOP® | PO(OCH3)3 |
| TEOP® | PO(OC2H5)3 |
ALD Precursors
Atomic Layer Deposition (ALD) is used to deposit nitride and oxide films onto substrates at the atomic layer level, enabling precise control to fabricate thin films around 10 nm in thickness.
Suitable materials exhibit high reactivity with oxidizing agents and, unlike metal alkoxides, do not form oxide films through self-thermal decomposition.
Because nitride films are effective as gate insulating films and barrier films, metal amides, imides, and metal chlorides are widely used.
Metal amides are represented by the formula M-NR1R2, metal imides by M=NR, and metal chlorides by MClx.
Commonly used compounds include TEMAZ、TDMAH、TBTEMT、ZrCl4、HfCl4、WCl6、AlCl3.
CVD Materials for High-Dielectric/Ferroelectric and Electrode Formation
We introduce MOCVD materials for ferroelectrics used in applications such as non-volatile memories.
Complexes with $\beta$-diketonate ligands such as dpm are commonly used for
Pb(Zr,Ti)O3(PZT), while Ta(OC2H5)5 is typically used for high-dielectric Ta2O5films.
Cyclopentadienyl compounds of rare earth elements RE(EtCp)₃
EtCp is attracting attention as a precursor that can achieve a lower melting point compared to Cp.
RE(EtCp)3 with proven synthesis results (including research, prototyping, and mass production)
| Y(EtCp)₃ | Sm(EtCp)₃ |
| La(EtCp)₃ | Gd(EtCp)₃ |
| Ce(EtCp)₃ | Tb(EtCp)₃ |
| Pr(EtCp)₃ | Er(EtCp)₃ |
| Nd(EtCp)₃ | Yb(EtCp)₃ |
β-Diketonate complexes
We handle more than 30 types of β-diketonate complexes. We are developing low-melting-point β-diketonate-based ALD/CVD materials other than dpm.
Supply is available in ampoules and cylinders (filling of customer-supplied containers and new production available).
Catalog by Element Group
Kojundo Chemical Laboratory offers a wide range of ALD/CVD materials covering various elements, including rare earth elements.
Please refer to the tables on the following pages for available products categorized by element group.
Group 1
| Elements | Products | Name | |
|---|---|---|---|
| Li | Li(O-t-C₄H₉) | LiOtBu | Lithium t-Butoxide |
| Li(C₁₁H₁₉O₂) | Li(dpm) | Lithium Dipivaloylmethanate | |
| Na | Na(O-t-C₄H₉) | NaOtBu | Sodium t-Butoxide |
| Na(C₁₁H₁₉O₂) | Na(dpm) | Sodium Dipivaloylmethanate | |
| K | K(O-t-C₄H₉) | KOtBu | Potassium t-Butoxide |
| K(C₁₁H₁₉O₂) | K(dpm) | Potassium Dipivaloylmethanate | |
| Rb | Rb(O-t-C₄H₉) | RbOtBu | Rubidium t-Butoxide |
| Cs | Cs(O-t-C₄H₉) | CsOtBu | Cesium t-Butoxide |
Group 2
| Elements | Products | Name | |
|---|---|---|---|
| Mg | Mg(C₁₁H₁₉O₂)₂ | Mg(dpm)₂ | Magnesium Bis-Dipivaloylmethanate |
| Ca | Ca(C₁₁H₁₉O₂)₂ | Ca(dpm)₂ | Calcium Bis-Dipivaloylmethanate |
| Sr | Sr(C₁₁H₁₉O₂)₂ | Sr(dpm)₂ | Strontium Bis-Dipivaloylmethanate |
| Sr[C₅(CH₃)₅]₂ | Sr(Cp*)₂ | Bis (Pentamethylcyclopentadienyl) Strontium | |
| Sr[C₅(CH₃)₄(C₃H₇)]₂ | Sr(Cpᵖᵐ)₂ | Bis (Propyltetramethylcyclopentadienyl) Strontium | |
| Ba | Ba(C₁₁H₁₉O₂)₂ | Ba(dpm)₂ | Barium Bis-Dipivaloylmethanate |
| Ba[C₅(CH₃)₄(C₃H₇)]₂ | Ba(Cpᵖᵐ)₂ | Bis (Propyltetramethylcyclopentadienyl) Barium |
Group 3
| Elements | Products | Name | |
|---|---|---|---|
| Sc | Sc(i-C₃H₇C₅H₄)₃ | Sc(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Scandium |
| Sc(C₁₀H₁₅O₂)₃ | Sc(ibac)₃ | Scandium Tris-Isobutyrylacetonate | |
| Sc(C₉H₁₃O₂)₃ | Sc(ibprm)₃ | Scandium Tris-Isobutyrylpropionylmethanate | |
| Sc(C₉H₁₅O₂)₃ | Sc(dibm)₃ | Scandium Tris-Diisobutyrylmetanate | |
| Sc(C₁₁H₁₉O₂)₃ | Sc(dpm)₃ | Scandium Tris-Dipivaloylmethanate | |
| Y | Y(n-C₄H₉C₅H₄)₃ | Y(nBuCp)₃ | Tris (n-Butylcyclopentadienyl) Yttrium |
| Y(C₁₁H₁₉O₂)₃ | Y(dpm)₃ | Yttrium Tris-Dipivaloylmethanate | |
| Y[N(Si(CH₃)₃)₂]₃ | Y(tmsa)₃ | Yttrium Tris[Bis (Trimethylsilyl) Amino] | |
| La | La(i-C₃H₇C₅H₄)₃ | La(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Lanthanum |
| La(C₅H₄C₂H₅)₃ | La(EtCp)₃ | Tris (Ethylcyclopentadienyl) Lanthanum | |
| La(C₁₁H₁₉O₂)₃ | La(dpm)₃ | Lanthanum Tris-Dipivaloylmethanate | |
| La(C₉H₁₅O₂)₃ | La(dibm)₃ | Lanthanum Tris-Diisobutyrylmetanate | |
| La[N(Si(CH₃)₃)₂]₃ | La[N(SiMe₃)₂]₃ | Lanthanum Tris[Bis (Trimethylsilyl) Amino] | |
| Ce | Ce(C₅H₄C₂H₅)₃ | Ce(EtCp)₃ | Tris (Etylcyclopentadienyl) Cerium |
| Ce[(C₃H₇)C₅H₄]₃ | Ce(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Cerium | |
| Ce(C₁₁H₁₉O₂)₄ | Ce(dpm)₄ | Cerium Tetrakis-Dipivaloylmethnate | |
| Pr | Pr(C₃H₇C₅H₄)₃ | Pr(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Praseodymium |
| Pr(C₁₁H₁₉O₂)₃ | Pr(dpm)₃ | Praseodymium Tris-Dipivaloylmethanate | |
| Pr(C₅H₄C₂H₅)₃ | Pr(EtCp)₃ | Tris (Ethylcyclopentadienyl) Praseodymium | |
| Nd | Nd(C₅H₄C₂H₅)₃ | Nd(EtCp)₃ | Tris (Ethylcyclopentadienyl) Neodymium |
| Nd(C₅H₄CH(CH₃)₂)₃ | Nd(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Neodymium | |
| Nd(C₁₁H₁₉O₂)₃ | Nd(dpm)₃ | Neodymium Tris-Dipivaloylmethanate | |
| Nd(C₉H₁₅O₂)₃ | Nd(dibm)₃ | Neodymium Tris-Diisobutyrylmetanate | |
| Sm | Sm(C₅H₄C₂H₅)₃ | Sm(EtCp)₃ | Tris (Etylcyclopentadienyl) Samarium |
| Sm(C₁₁H₁₉O₂)₃ | Sm(dpm)₃ | Samarium Tris-Dipivaloylmethanate | |
| Eu | Eu[C₅(CH₃)₄(C₃H₇)]₂ | Eu(Cpᵖᵐ)₂ | Bis (n-Propyltetramethylcyclopentadienyl) Europium |
| Eu(C₁₁H₁₉O₂)₃ | Eu(dpm)₃ | Europium Tris-Dipivaloylmethanate | |
| Gd | Gd(C₅H₄C₂H₅)₃ | Gd(EtCp)₃ | Tris (Ethylcyclopentadienyl) Gadolinium |
| Gd(C₅H₄CH(CH₃)₂)₃ | Gd(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Gadolinium | |
| Gd(N(Si(CH₃)₃)₂)₃ | Gd[N(SiMe₃)₂]₃ | Gadolinium Tris[Bis (Trimethylsilyl) Amide] | |
| Gd(C₁₁H₁₉O₂)₃ | Gd(dpm)₃ | Gadolinium Tris-Dipivaloylmethanate | |
| Tb | Tb(i-C₃H₇C₅H₄)₃ | Tb(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Terbium |
| Tb(C₉H₁₅O₂)₃ | Tb(dibm)₃ | Terbium Tris (Diisobutyrylmethanate) | |
| Tb(C₁₁H₁₉O₂)₃ | Tb(dpm)₃ | Terbium Tris-Dipivaloylmethanate | |
| Dy | Dy(C₅H₄C₂H₅)₃ | Dy(EtCp)₃ | Tris (Ethylcyclopentadienyl) Dysprosium |
| Dy(C₁₁H₁₉O₂)₃ | Dy(dpm)₃ | Dysprosium Tris-Dipivaloylmethanate | |
| Ho | Ho(C₁₁H₁₉O₂)₃ | Ho(dpm)₃ | Holmium Tris-Dipivaloylmethanate |
| Er | Er(C₅H₄CH₃)₃ | Er(MeCp)₃ | Tris (Methylcyclopentadienyl) Erbium |
| Er(C₅H₄C₂H₅)₃ | Er(EtCp)₃ | Tris (Ethylcyclopentadienyl) Erbium | |
| Er(C₃H₇C₅H₄)₃ | Er(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Erbium | |
| Er(C₁₁H₁₉O₂)₃ | Er(dpm)₃ | Erbium Tris-Dipivaloylmethanate | |
| Tm | Tm(i-C₃H₇C₅H₄)₃ | Tm(iPrCp)₃ | Tris (i-propylcyclopentadienyl) Thulium |
| Tm(C₁₁H₁₉O₂)₃ | Tm(dpm)₃ | Thulium Tris-Dipivaloylmethanate | |
| Yb | Yb(i-C₃H₇C₅H₄)₃ | Yb(iPrCp)₃ | Tris (i-Propylcyclopentadienyl) Ytterbium |
| Yb(C₁₁H₁₉O₂)₃ | Yb(dpm)₃ | Ytterbium Tris-Dipivaloylmethanate | |
| Lu | Lu(C₁₁H₁₉O₂)₃ | Lu(dpm)₃ | Lutetium Tris-Dipivaloylmethanate |
Group 4
| Elements | Products | Name | |
|---|---|---|---|
| Ti | Ti(OC₂H₅)₄ | Ti(OEt)₄ | Titanium Tetraethoxide |
| Ti(O-i-C₃H₇)₄ | Ti(OiPr)₄ | Titanium Tetra-i-Propoxide | |
| Ti(O-t-C₄H₉)₄ | Ti(OtBu)₄ | Titanium Tetra-t-Butoxide | |
| Ti[N(CH₃)₂]₄ | Ti(NMe₂)₄ | Titanium Tetrakisdimethylamide | |
| Ti[N(C₂H₅)₂]₄ | Ti(NEt₂)₄ | Titanium Tetrakisdiethylamide | |
| Ti[N(C₂H₅)CH₃]₄ | Ti(NEtMe)₄ | Tetrakis (Ethylmethylamino) Titanium | |
| Ti(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Ti(OiPr)₂(dpm)₂ | Titanium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Ti(O-i-C₃H₇)₂(C₉H₁₅O₂)₂ | Ti(OiPr)₂(dibm)₂ | Titanium Di (i-Propoxy) Bis (Diisobutyrylmethanate) | |
| Zr | Zr(O-i-C₃H₇)₄ | Zr(OiPr)₄ | Zirconium Tetra-i-Propoxide |
| Zr(O-t-C₄H₉)₄ | Zr(OtBu)₄ | Zirconium Tetra-t-Butoxide | |
| Zr(O-t-C₄H₉)(C₁₁H₁₉O₂)₃ | Zr(OtBu)(dpm)₃ | Zirconium (t-Butoxy) Tris (Dipivaloylmethanate) | |
| Zr(C₁₁H₁₉O₂)₄ | Zr(dpm)₄ | Zirconium Tetrakis-Dipivaloylmethanate | |
| Zr(O-i-C₃H₇)(C₁₁H₁₉O₂)₃ | Zr(OiPr)(dpm)₃ | Zirconium (i-Propoxy) Tris (Dipivaloylmethanate) | |
| Zr(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Zr(OiPr)₂(dpm)₂ | Zirconium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Zr[N(CH₃)₂]₄ | Zr(NMe₂)₄ | Tetrakis (Dimethylamino) Zirconium | |
| Zr[N(C₂H₅)CH₃]₄ | Zr(NEtMe)₄ | Tetrakis (Ethylmethylamino) Zirconium | |
| Zr(C₉H₁₅O₂)₄ | Zr(dibm)₄ | Zirconium Tetrakis-Diisobutyrylmethanate | |
| Hf | Hf(O-t-C₄H₉)₄ | Hf(OtBu)₄ | Hafnium Tetra-t-Butoxide |
| Hf(C₁₁H₁₉O₂)₄ | Hf(dpm)₄ | Hafnium Tetrakis (Dipivaloylmethanate) | |
| Hf(O-i-C₃H₇)₂(C₁₁H₁₉O₂)₂ | Hf(OiPr)₂(dpm)₂ | Hafnium Di (i-Propoxy) Bis (Dipivaloylmethanate) | |
| Hf[N(CH₃)₂]₄ | Hf(NMe₂)₄ | Tetrakis (Dimethylamino) Hafnium | |
| Hf[N(C₂H₅)CH₃]₄ | Hf(NEtMe)₄ | Tetrakis (Ethylmethylamino) Hafnium | |
| Hf[N(C₂H₅)₂]₄ | Hf(NEt₂)₄ | Tetrakis (Diethylamino) Hafnium |
Group 5
| Elements | Products | Name | |
|---|---|---|---|
| V | VO(OCH₃)₃ | VO(OMe)₃ | Vanadium (V) Trimethoxideoxide |
| VO(OC₂H₅)₃ | VO(OEt)₃ | Vanadium (V) Triethoxideoxide | |
| VO(O-i-C₃H₇)₃ | VO(OiPr)₃ | Vanadium (V) Tri-i-Propoxideoxide | |
| VO(O-n-C₃H₇)₃ | VO(OnPr)₃ | Vanadium (V) Tri-n-Propoxideoxide | |
| VO(O-i-C₄H₉)₃ | VO(OiBu)₃ | Vanadium (V) Tri-i-Butoxideoxide | |
| VO(O-n-C₄H₉)₃ | VO(OnBu)₃ | Vanadium (V) Tri-n-Butoxideoxide | |
| VO(O-sec-C₄H₉)₃ | VO(OsecBu)₃ | Vanadium (V) Tri-sec-Butoxideoxide | |
| VO(O-t-C₄H₉)₃ | VO(OtBu)₃ | Vanadium (V) Tri-t-Butoxideoxide | |
| V(C₁₁H₁₉O₂)₃ | V(dpm)₃ | Vanadium Tris-Dipivaloylmethanate | |
| V(N(CH₃)₂)₅ | V(NMe₂)₅ | Pentakis (Dimethylamino) Vanadium | |
| V(N(C₂H₅)CH₃)₄ | V(NEtMe)₄ | Pentakis (Ethylmethylamino) Vanadium | |
| Nb | Nb(OCH₃)₅ | Nb(OMe)₅ | Niobium Pentamethoxide |
| Nb(OC₂H₅)₅ | Nb(OEt)₅ | Niobium Pentaethoxide | |
| Nb(O-i-C₄H₉)₅ | Nb(OiBu)₅ | Niobium Penta-i-Butoxide | |
| Nb(O-sec-C₄H₉)₅ | Nb(OsecBu)₅ | Niobium Penta-sec-Butoxide | |
| Nb[NC(CH₃)₃][N(C₂H₅)(CH₃)]₃ | Nb(NtBu)(NEtMe)₃ | (t-Butylimido) Tris (Ethylmethylamido) Niobium | |
| Nb(N-t-C₅H₁₁)[N(CH₃)₂]₃ | Nb(NtAm)(NMe₂)₃ | t-Amylimido Tris (Dimethylamido) Niobium | |
| Ta | Ta(OCH₃)₅ | Ta(OMe)₅ | Tantalum Pentamethoxide |
| Ta(OC₂H₅)₅ | Ta(OEt)₅ | Tantalum Pentaethoxide | |
| Ta(O-i-C₃H₇)₅ | Ta(OiPr)₅ | Tantalum Penta-i-Propoxide | |
| Ta(O-n-C₃H₇)₅ | Ta(OnPr)₅ | Tantalum Penta-n-Propoxide | |
| Ta(O-n-C₄H₉)₅ | Ta(OnBu)₅ | Tantalum Penta-n-Butoxide | |
| Ta(O-sec-C₄H₉)₅ | Ta(OsecBu)₅ | Tantalum Penta-sec-Butoxide | |
| Ta(N-t-C₅H₁₁)[N(CH₃)₂]₃ | Ta(NtAm)(NMe₂)₃ | t-Amylimido Tris (Dimethylamino) Tantalum | |
| Ta(N-t-C₄H₉)[N(CH₃)₂]₃ | Ta(NtBu)(NMe₂)₃ | t-Butylimido Tris (Dimethylamino) Tantalum | |
| Ta(N-t-C₄H₉)[N(C₂H₅)CH₃]₃ | Ta(NtBu)(NEtMe)₃ | (t-Butylimido) Tris (Ethylmethylamino) Tantalum |
Group 6
| Elements | Products | Name | |
|---|---|---|---|
| Cr | Cr(C₁₁H₁₉O₂)₃ | Cr(dpm)₃ | Chromium Tris-Dipivaloylmethanate |
| Mo | Mo(C₁₁H₁₉O₂)₃ | Mo(dpm)₃ | Molybdenum Tris-Dipivaloylmethanate |
| W | W(OC₂H₅)₅ | W(OEt)₅ | Tungsten Pentaethoxide |
Group 7
| Elements | Products | Name | |
|---|---|---|---|
| Mn | Mn(C₁₁H₁₉O₂)₃ | Mn(dpm)₃ | Manganese Tris-Dipivaloylmethanate |
Group 8
| Elements | Products | Name | |
|---|---|---|---|
| Fe | Fe(C₁₁H₁₉O₂)₃ | Fe(dpm)₃ | Iron Tris-Dipivaloylmethanate |
| Fe(C₉H₁₅O₂)₃ | Fe(dibm)₃ | Iron Tris-Diisobutyrylmethanate | |
| Ru | Ru(C₅H₄C₂H₅)₂ | Ru(EtCp)₂ | Bis (Ethylcyclopentadienyl) Ruthenium |
| Ru(C₁₁H₁₉O₂)₃ | Ru(dpm)₃ | Ruthenium Tris-Dipivaloylmethanate | |
| Ru(C₉H₁₅O₂)₃ | Ru(dibm)₃ | Ruthenium Tris-Diisobutyrylmethanate |
Group 9
| Elements | Products | Name | |
|---|---|---|---|
| Co | Co(C₅H₄C₂H₅)₂ | Co(EtCp)₂ | Bis (Ethylcyclopentadienyl) Cobalt |
| Co(C₁₁H₁₉O₂)₂ | Co(dpm)₂ | Cobalt Bis-Dipivaloylmethanate | |
| Co(C₁₁H₁₉O₂)₃ | Co(dpm)₃ | Cobalt Tris-Dipivaloylmethanate | |
| Ir | Ir(C₅H₄C₂H₅)(C₈H₁₂) | Ir(EtCp)(cod) | Ethycyclopentadienyl/ (1, 5-Cyclooctadiene) Iridium |
Group 10
| Elements | Products | Name | |
|---|---|---|---|
| Ni | Ni(C₅H₄C₂H₅)₂ | Ni(EtCp)₂ | Bis (Ethylcyclopentadienyl) Nickel |
| Ni(C₁₁H₁₉O₂)₂ | Ni(dpm)₂ | Nickel Bis-Dipivaloylmethanate | |
| Ni(C₉H₁₅O₂)₂ | Ni(dibm)₂ | Nickel Bis-Diisobutyrylmethanate | |
| Pd | Pd(C₁₁H₁₉O₂)₂ | Pd(dpm)₂ | Palladium Bis-Dipivaloylmethanate |
Group 11
| Elements | Products | Name | |
|---|---|---|---|
| Cu | Cu(C₁₁H₁₉O₂)₂ | Cu(dpm)₂ | Copper Bis-Dipivaloylmethanate |
| Cu(C₉H₁₅O₂)₂ | Cu(dibm)₂ | Copper Bis-Diisobutyrylmethanate | |
| Cu(C₅HF₆O₂)₂ | Cu(hfac)₂ | Copper Hexafluoroacetylacetonate | |
| Au | AuP(CH₃)₃(CH₃)₃ | Au(PMe₃)Me₃ | Trimethyl (Trimethylphosphine) Gold |
Group 12
| Elements | Products | Name | |
|---|---|---|---|
| Zn | Zn(C₁₁H₁₉O₂)₂ | Zn(dpm)₂ | Zinc Bis-Dipivaloylmethanate |
| Zn[C₅(CH₃)₄(C₃H₇)]₂ | Zn(Cpᵖᵐ)₂ | Bis (Tetramethyl n-Propyl Cyclopentadienyl) Zinc |
Group 13
| Elements | Products | Name | |
|---|---|---|---|
| B | B(OCH₃)₃ | B(OMe)₃ | Boron Trimethoxide |
| B(OC₂H₅)₃ | B(OEt)₃ | Boron Triethoxide | |
| B[N(C₂H₅)CH₃]₃ | B(NEtMe)₃ | Tris (Ethylmethylamino) Borane | |
| Al | Al(O-i-C₃H₇)₃ | Al(OiPr)₃ | Aluminum Tri-i-Propoxide |
| Al(O-n-C₄H₉)₃ | Al(OnBu)₃ | Aluminum Tri-n-Butoxide | |
| Al(O-i-C₄H₉)₃ | Al(OiBu)₃ | Aluminum Tri-i-Butoxide | |
| Al(O-sec-C₄H₉)₃ | Al(OsecBu)₃ | Aluminum Tri-sec-Butoxide | |
| Al(C₁₁H₁₉O₂)₃ | Al(dpm)₃ | Aluminum Tris-Dipivaloylmethanate | |
| Al(C₅H₇O₂)₃ | Al(acac)₃ | Aluminum Tris-Acetylacetonate | |
| Al(C₉H₁₅O₂)₃ | Al(dibm)₃ | Aluminum Tris-Diisobutyrylmethanate | |
| Ga | Ga(OCH₃)₃ | Ga(OMe)₃ | Gallium Trimethoxide |
| Ga(OC₂H₅)₃ | Ga(OEt)₃ | Gallium Triethoxide | |
| Ga(O-i-C₃H₇)₃ | Ga(OiPr)₃ | Gallium Tri-i-Propoxide | |
| Ga(O-n-C₄H₉)₃ | Ga(OnBu)₃ | Gallium Tri-n-Butoxide | |
| Ga[C₅(CH₃)₅] | Ga(Cp*) | Pentamethylcyclopentadienyl Gallium | |
| Ga(C₅H₇O₂)₃ | Ga(acac)₃ | Gallium Tris-Acetylacetonate | |
| Ga(C₁₁H₁₉O₂)₃ | Ga(dpm)₃ | Gallium Tris-Dipivaloylmethanate | |
| In | In(C₅H₄C₂H₅) | In(EtCp) | Ethylcyclopentadienyl Indium |
Group 14
| Elements | Products | Name | |
|---|---|---|---|
| Si | Si(O-i-C₃H₇)₄ | Si(OiPr)₄ | Silicon Tetra-i-Propoxide |
| Si(O-n-C₄H₉)₄ | Si(OnBu)₄ | Silicon Tetra-n-Butoxide | |
| Si(O-i-C₄H₉)₄ | Si(OiBu)₄ | Silicon Tetra-i-Butoxide | |
| Si(O-t-C₄H₉)₄ | Si(OtBu)₄ | Silicon Tetra-t-Butoxide | |
| SiH[N(CH₃)₂]₃ | SiH(NMe₂)₃ | Tris Dimethylamino Silane | |
| Ge | Ge(OCH₃)₄ | Ge(OMe)₄ | Germanium Tetramethoxide |
| Ge(OC₂H₅)₄ | Ge(OEt)₄ | Germanium Tetraethoxide | |
| Ge(O-i-C₃H₇)₄ | Ge(OiPr)₄ | Germanium Tetra-i-Propoxide | |
| Ge(O-n-C₃H₇)₄ | Ge(OnPr)₄ | Germanium Tetra-n-Propoxide | |
| Ge(O-n-C₄H₉)₄ | Ge(OnBu)₄ | Germanium Tetra-n-Butoxide | |
| Ge(O-sec-C₄H₉)₄ | Ge(OsecBu)₄ | Germanium Tetra-sec-Butoxide | |
| Ge(N(CH₃)₂)₄ | Ge(NMe₂)₄ | Tetrakis (Dimethylamino) Germane | |
| Sn | Sn(C₅H₄C₂H₅)₂ | Sn(EtCp)₂ | Bis (Ethylcyclopentadienyl) Tin |
| Sn[N(C₂H₅)₂]₄ | Sn(NEt₂)₄ | Tetrakis (Diethylamino) Tin | |
| Sn[N(CH₃)₂]₄ | Sn(NMe₂)₄ | Tetrakis (Dimethylamino) Tin | |
| Pb | Pb(C₁₁H₁₉O₂)₂ | Pb(dpm)₂ | Lead Bis-Dipivaloylmethanate |
| Pb(C₉H₁₅O₂)₂ | Pb(dibm)₂ | Lead Bis-Diisobutyrylmethanate |
Group 15
| Elements | Products | Name | |
|---|---|---|---|
| P | P(OCH₃)₃ | P(OMe)₃ | Trimethylphosphite |
| P(OC₂H₅)₃ | P(OEt)₃ | Triethylphosphite | |
| PO(OCH₃)₃ | PO(OMe)₃ | Trimethylphosphate | |
| PO(OC₂H₅)₃ | PO(OEt)₃ | Triethylphosphate | |
| PO(O-n-C₄H₉)₃ | PO(OnBu)₃ | Tri-n-Butyl Phosphate | |
| Sb | Sb(OCH₃)₃ | Sb(OMe)₃ | Antimony Trimethoxide |
| Sb(OC₂H₅)₃ | Sb(OEt)₃ | Antimony Triethoxide | |
| Sb(O-i-C₃H₇)₃ | Sb(OiPr)₃ | Antimony Tri-i-Propoxide | |
| Sb(O-n-C₃H₇)₃ | Sb(OnPr)₃ | Antimony Tri-n-Propoxide | |
| Sb(O-i-C₄H₉)₃ | Sb(OiBu)₃ | Antimony Tri-i-Butoxide | |
| Sb(O-n-C₄H₉)₃ | Sb(OnBu)₃ | Antimony Tri-n-Butoxide | |
| Sb(O-sec-C₄H₉)₃ | Sb(OsecBu)₃ | Antimony Tri-sec-Butoxide | |
| Sb(O-t-C₄H₉)₃ | Sb(OtBu)₃ | Antimony Tri-t-Butoxide | |
| Sb[N(CH₃)₂]₃ | Sb(NMe₂)₃ | Tris (Dimethylamino) Antimony | |
| Bi | Bi[N(Si(CH₃)₃)₂]₃ | Bi[N(SiMe₃)₂]₃ | Tris[Bis (Trimethylsilyl) amino]bismuthine |
| Bi(O-t-C₅H₁₁)₃ | Bi(OtAm)₃ | Bismuth Tri-t-Amyloxide | |
| Bi(C₆H₅)₃ | Bi(Ph)₃ | Bismuthine Triphenyl | |
| Bi(C₁₁H₁₉O₂)₃ | Bi(dpm)₃ | Bismuth Tris-Dipivaloylmethanate |
Group 16
| Elements | Products | Name | |
|---|---|---|---|
| Te | Te(OC₂H₅)₄ | Te(OEt)₄ | Tellurium Tetraethoxide |
| Te(Si(CH₃)₃)₂ | Te(SiMe₃)₂ | Bis (Trimethylsilyl) Tellurium |