Materials for Thin Film Deposition

Sputtering Targets

This class of materials are used for various sputtering methods. We can provide targets of metals, alloys and ceramics in a composition and a shape you desire.

Evaporation Materials

This class of materials are used for evaporation methods. We provide metals and ceramics in the form of tablets, chips or grains. We can provide also evaporation components, such as boats and filaments.

CVD

This class of materials are used for CVD/ALD methods. We provide alkoxides, halides, metal amides, imides and so on. We can also deal with design and maintenance of a packing cylinder.

CSD

This class of materials are coating materials from which thin films of oxide materials can be easily prepared by coating a solution onto a substrate and then drying and heat-treating the coated layer. We provide materials for the MOD method and those for the sol-gel method.